- What are the main applications for TMAH? Photolithography(including EUV), etching, cleaning, formulation component. Is is also used in polymer, electrolyte and photovoltaic applications.
- What is the usual concentration of TMAH? Commercially most use 25% aqueous solution. Also sold as 2.38% developer solution.
- What benefits does TMAH provide in semiconductor manufacturing? Available in high volume and high purity. Ionic liquid providing metal ion free, strong organic base. High selective silicon etchant.
- Is TMAH toxic? Yes, as all chemicals TMAH has a toxicity profile. However, it has been used safely for many years using proper methods and procedures.
- Are there alternatives to TMAH? Yes, multiple higher molecular weight quaternary hydroxides and can be used as alternatives for TMAH.
- Does the purity of TMAH matter? Yes! Metals and particles are the most common impurities, particularly in semiconductor applications.
- What are ways to safely handle TMAH? It is toxic and corrosive and safety measures for both should be considered when handling. If you are interested, SACHEM has a safety presentation available. Click here to learn more.
- What are ways to dispose of TMAH? Proper disposal should be followed according to the SDS. Click here for the SDS
- Is TMAH available globally? Yes, TMAH is manufactured in the US and Asia and is available globally.
- What are typical packages for TMAH? Typically in drums, IBC’s, or ISO delivery (tank wagon).
- Can TMAH be recycled? Yes. SACHEM’s Mobius Technology provides TMAH reclaim and recycling.
- What materials of construction are recommended for TMAH? MOC for non high purity applications, MOC for high purity applications
