Author: Systems Administrator
Last saved by: Wilfred W. Wilson
Company: Dell Computer Corporation

TMAH MATERIALS COMPATIBILITY
 "HIGH PURITY" APPLICATIONS

APPLICABILITY
	This information is related to the materials compatibility of aqueous solutions of TMAH.  It is intended for applications that require contaminant levels in the parts per billion range.  The data is based on SACHEM’s experience in the manufacture and handling of TMAH in water.  Extrapolation of the data to TMAH solutions containing other constituent materials must be considered and tested carefully  prior to use.  Materials of construction not referenced in this list indicate a lack of experience and data regarding compatibility in high purity applications.

METALLICS
	RECOMMENDED
		Nickel 200

	NOT RECOMMENDED
                      Stainless Steels                     
		Aluminum
		Copper
		Carbon Steel

NON-METALLICS
	RECOMMENDED
		Polypropylene (PP) (High Purity Grade Only)
		Polyethylene (PE)   (High Purity Grade Only)
		PTFE
		PFA
		ETFE
		PCTFE
		FEP

	NOT RECOMMENDED
		Polyvinylidene fluoride (PVDF)
                      Polyvinyl chloride (PVC)

ELASTOMERS
	RECOMMENDED
		EPDM
		EPR
		Kalrez

	NOT RECOMMENDED
		Buna-N
		Viton
                      Silicone