Austin, TX August 6, 2012 Safe and environmentally responsible handling of tetramethylammonium hydroxide (TMAH) in semiconductor manufacturing is critical at all stages of Fab operations. SACHEM has pioneered systems for true recycle and reuse of TMAH that is recovered from Fab processes. SACHEM Chief Technology Officer, Dr. Craig Allen will review recovery and recycle options for TMAH at SEMI Strategic Materials Conference, October 23-24th, 2012 in San Jose, California.
The 2012 Strategic Materials Conference (SMC) is dedicated to exploring the synergies, trends and business opportunities in advanced electronic materials.
“Expanded use of TMAH in front end of line etching and back end of line wafer thinning can lead to significant volumes of TMAH waste that are added to the already large volumes of wastes from developer and rinses that are generated by photolithographic processes, says Dr. Craig Allen, Chief Technology Officer at SACHEM, Inc. “At the same time, demands for waste reduction, improved chemical efficiency and more stringent discharge limits have challenged traditional waste treatment processes and models. Based on our experience in commercial scale operations, we will present an overview of recycle and recovery options of TMAH.”
Headquartered in Austin, Texas, SACHEM is a chemical science company with full commercial operations and research facilities in North America, Europe, China and Japan. Our technology revolves around high purity and is successfully applied in markets like electronic materials, oilfield chemicals, catalysts, polymers, pharmaceutical, agrochemicals, biotechnology and energy materials.