SACHEM announced today that it will present a technical paper and exhibit at Semicon Korea 2007.Austin, TX – January 2, 2007 – SACHEM, Inc. announced today that it will present a technical paper and exhibit at Semicon Korea 2007 at the COEX Exhibition Centre in Seoul, Korea. The focus of the presentation and exhibit will be on SACHEM’s Front End of Line (FEOL) selective cleaning and etching technology. Russell Stevens, SACHEM’s Manager of Applications Engineering, will be presenting a paper on new technology for cleaning of post-etch residues from high aspect ratio contacts. The conference is scheduled for January 31 – February 2, 2007 in Seoul.
SACHEM’s SelectEtchTM SE-1220 will be a featured product. SelectEtchTM SE-1220 represents a significant improvement in high-aspect-ratio contact clean performance. The product successfully removes etch-generated residues from the bottom and sides of advanced contact features. SE-1220’s chemical design and functionality allow it to remove residues while achieving outstanding surface roughness and maintaining critical dimensions, especially in complex film stacks.
Another new technology performance product, SACHEM’s SelectEtchTM SE-1100, will also be featured. SelectEtchTM SE-1100 is a fluoride containing, semi-aqueous etchant designed for removing thermal and doped oxides selectively to silicon nitrides. In addition, SE-1100 has excellent compatibility with polysilicon and nitrided metals.
Mark Stasney, Electronic Materials Marketing Manager of SACHEM, Inc., commented, “SelectEtchTM SE-1100 and SE-1220 provide our customers with a powerful tool for etching and cleaning, with both selective and non-selective characteristics. Given the integration of new Front End materials and increased precision required in critical dimensions, we foresee performance limitations to existing dHF and BOE chemistries in FEOL applications. We are excited to offer process engineers our SelectEtchTMproducts which provide the highest in selectivity performance.”
SACHEM, Inc. delivers highly pure, precise and innovative chemical solutions designed to solve the most demanding and challenging applications. For over 50 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, biotechnology, starch modification, polymers, catalysts, pharmaceutical and agricultural chemicals. Based in Austin, Texas, SACHEM’s expanding worldwide operations include manufacturing and research facilities in North America, Europe and Asia with a global service network and presence spanning over 30 countries. For more information about SACHEM, Inc. please view http://www.sacheminc.com/.
CONTACT
Mark Stasney
Marketing Manager, Electronic Materials
Phone: 512.421-4906
Fax: 512.445-5066
Email: mstasney@sacheminc.com
