SACHEM announced today that it will present a technical paper and exhibit new products and capabilities at Semicon China 2007. Austin, TX – March 2, 2007 – SACHEM, Inc. announced today that it will present a technical paper and exhibit at Semicon China 2007 at the Shanghai New International Expo Centre, Shanghai, China. The focus of the exhibit at Booth #3719 will be on SACHEM’s Front End of Line (FEOL) selective cleaning and etching technology, as well as new manufacturing capabilities SACHEM is bringing on-line in Asia. The conference is scheduled for March 21-23, 2007 in Shanghai.
SACHEM’s SelectEtchTM SE-1220 will be a featured product. SelectEtchTM SE-1220 represents a significant improvement in high-aspect-ratio contact clean performance. The product successfully removes etch-generated residues from the bottom and sides of advanced contact features. SE-1220’s chemical design and functionality allow it to remove residues while achieving outstanding surface roughness and maintaining critical dimensions, especially in complex film stacks. Mr. Russell Stevens, Applications Engineering Manager for SACHEM, will present a paper on “Via Preparation Technology for High Aspect Ratio Contacts” at the SEMI Theater (Booth 3179) on Wednesday, 21 March at 2:45pm.
Another new technology performance product, SACHEM’s SelectEtchTM SE-1100, will also be featured. SelectEtchTM SE-1100 is a fluoride containing, semi-aqueous etchant designed for removing thermal and doped oxides selectively to silicon nitrides. In addition, SE-1100 has excellent compatibility with polysilicon and nitrided metals. The primary application is in selective oxide hardmask removal. Selectivity and etch performance significantly exceeds that of traditional chemistries such as dilute HF.
SACHEM is also proud to highlight progress and plans for the new manufacturing center in Wuxi, China. Construction is well-underway and proceeding aggressively. The new facility will bring about broad manufacturing capabilities targeted across SACHEM’s strategic markets, as well as Research and Development capabilities.
Mark Stasney, Electronic Materials Marketing Manager of SACHEM, Inc., commented, “SelectEtchTM SE-1100 and SE-1220 provide our customers with differentiated tools for etching and cleaning, with both selective and non-selective characteristics. We are excited to offer process engineers our SelectEtchTM products which provide the highest in selectivity performance.”
SACHEM, Inc. delivers highly pure, precise and innovative chemical solutions designed to solve the most demanding and challenging applications. For over 50 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, biotechnology, starch modification, polymers, catalysts, pharmaceutical and agricultural chemicals. Based in Austin, Texas, SACHEM’s expanding worldwide operations include manufacturing and research facilities in North America, Europe and Asia with a global service network and presence spanning over 30 countries. For more information about SACHEM, Inc. please view http://www.sacheminc.com/.
CONTACT
Mark Stasney
Marketing Manager, Electronic Materials
Phone: 512.421-4906
Fax: 512.445-5066
Email: mstasney@sacheminc.com
