SACHEM announced today that it will exhibit at Semicon Korea 2008, Booth No. 1750. Austin, TX – January 15, 2008 – SACHEM, Inc. announced today that it will exhibit at Semicon Korea 2008 at the COEX Exhibition Centre (Booth No. 1750) in Seoul, Korea. The focus of the exhibit will be on SACHEM’s Front End of Line (FEOL) selective cleaning and etching technology. The conference is scheduled for January 30 – February 1, 2008 in Seoul.
SACHEM’s SelectEtchTM SE-1430 will be a featured product and is a proprietary etchant with improved planar etch selectivity. This product produces decreased surface roughness and improves process control through lower, controllable etch rates. SACHEM’s proprietary chemical science eliminates the need to use KOH or TMAH. In SE-1430, etch rates are slowed, forming distinct angles between the interfaces and smoothing the bottom and sidewalls of the structures.
Another new technology performance product, SACHEM’s SelectEtchTM SE-1130, will also be featured. SelectEtchTM SE-1130 is a selective etchant designed to etch TEOS selectively to thermal oxides with higher selectivity than can be achieved with dilute Hydrofluoric Acid (dHF) or Buffered Oxide Etch (BOE).
Bill Bowers, Electronic Materials R&D Director of SACHEM, Inc., commented, “SelectEtchTM SE-1130 and SelectEtchTM SE-1430 provide our customers with innovative products for precision etching with highly selective characteristics. Given the integration of new Front End materials and single wafer tools, we foresee performance limitations to existing dHF, BOE, and other bulk-etch chemistries in FEOL applications. These new products provide engineers with powerful tools for optimizing their processes.”
SACHEM, Inc. delivers highly pure, precise and innovative chemical solutions designed to solve the most demanding and challenging applications. For over 50 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, biotechnology, starch modification, polymers, catalysts, pharmaceutical and agricultural chemicals. Based in Austin, Texas, SACHEM’s expanding worldwide operations include manufacturing and research facilities in North America, Europe and Asia with a global service network and presence spanning over 30 countries.
