Ethyltrimethylammonium Hydroxide | ETMAH | CAS# 30382-83-3

Ethyltrimethylammonium Hydroxide ETMAH CAS#30382-83-3SACHEM’s Ethyltrimethylammonium Hydroxide or ETMAH is highly pure quaternary ammonium compound that has a variety of applications. Our clients have found use of ETMAH in the integrated circuit manufacturing market as a formulation component for selective etch applications.

Applications
SACHEM’s Envure System™ is a line of products developed to meet the continuing challenges facing the integrated circuit (IC) market. ETMAH is an Envure SE™ product which forms the foundation in many critical formulations in polysilicon etching applications and is an excellent alternative to Tetramethylammonium Hydroxide.

Why Ethyltrimethylammonium Hydroxide (ETMAH)  is beneficial for etch applications:

  • Comparable performance to TMAH: Higher LD50 levels in dermal exposure
  • Tunable with temperature and concentration for IC and PV applications
  • Good organic solubility and increased performance
  • Low metal ion and halide levels provide flexibility to integrate lower purity components in applications with overall “contamination budgets”

Other Applications:

Available Products
Ethyltrimethylammonium Hydroxide, 20% Aqueous Ultra Pure
ETMAH 20% AQ UP
CAS# 30382-83-3
SDS
  • Synonyms: Ethanaminium, N,N,N-trimethyl-, hydroxide
  • Molecular Formula: C5H15NO
  • Molecular Weight: 105.1787 g/mol