SACHEM announced today that it will participate in the Wafer Cleaning Seminar as a sponsor, showcasing new products and capabilities in FEOL selective etching and cleaning.
Austin, TX August 7, 2007 – SACHEM, Inc. announced today that it will sponsor the Semiconductor International Wafer Cleaning Seminar in Shanghai. The focus of the one-day technical seminar is new challenges and technologies in wafer cleaning. SACHEM will showcase Front End of Line (FEOL) selective cleaning and etching technology. The seminar is scheduled for Thursday, August 9, 2007 in the Riverfront Business Hotel in the Pudong District of Shanghai.
SACHEM has designed new technology for selective oxide hardmask etch. SelectEtch™ SE-1100 is a fluoride containing, semi-aqueous etchant designed for removing thermal and doped oxides selectively to silicon nitrides. In addition, SE-1100 has excellent compatibility with Polysilicon and Silicon Nitride (SiN) and Titanium Nitride (TiN). Selectivity and etch performance significantly exceeds that of traditional chemistries such as dilute HF.
Another new technology performance product, SACHEM’s SelectEtch™ SE-1220, will also be featured. SelectEtch™ SE-1220 represents a significant improvement in high-aspect-ratio contact clean performance. It successfully removes etch-generated residues from the bottom and sides of advanced contact features, achieving 1:1 selectivity between thermal oxides and lower density oxides such as BPSG and SOD. SE-1220’s chemical design and functionality allow it to remove residues while achieving outstanding surface roughness and maintaining critical dimensions, especially in complex film stacks.
Mark Stasney, Electronic Materials Marketing Manager of SACHEM, Inc., commented, “SACHEM’s sole focus lies in delivering outstanding selectivity and clean peformance in Front End of Line applications. Opportunities are being created where standard FEOL chemistries cannot perform or cannot take advantage of new tool capabilities. We are excited to offer process engineers our SelectEtch™ products which provide the highest in selectivity performance as compared with standard FEOL chemistries.
SACHEM, Inc. delivers highly pure, precise and innovative chemical solutions designed to solve the most demanding and challenging applications. For over 50 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, biotechnology, starch modification, polymers, catalysts, pharmaceutical and agricultural chemicals. Based in Austin, Texas, SACHEM’s expanding worldwide operations include manufacturing and research facilities in North America, Europe and Asia with a global service network and presence spanning over 30 countries. For more information about SACHEM, Inc. please view www.SACHEMINC.com.
