Planar-Selective Silicon Etchant allows device manufacturers to create more precise structures in crystalline silicon through enhanced silicon recess feature formation and improved surface roughness characteristics.
(Austin, TX)- January 8, 2008 – SACHEM, Inc. announced today the introduction of SelectEtchTM SE-1430, a high performance formulation for planar-selective etching of crystalline silicon in advanced integrated circuits. SelectEtchTM SE-1430’s pioneering technology incorporates specifically designed functional raw materials resulting in improved selectivity between crystalline planes and a slower, more controllable etch rate. SE-1430 etches silicon with measurably improved (lower) selectivity between the <1,0,0> crystal plane and the <1,1,1> crystal plane relative to dilute TMAH solutions, which etch at rates too high for adequate control.

SelectEtchTM SE-1430 is an aqueous etchant designed for removing silicon to create precisely designed structures. SE-1430 is an aqueous formulation, compatible with most standard materials of manufacture.

The capability to etch crystalline silicon with planar selectivity can be utilized to create complex Silicon Germanium (SiGe) source-drain recess structures for the purpose of creating strain in pMOS devices. Creation of the sigma-shaped source-drain recess is advantageous for achieving the appropriate level of strain in the transistor and takes advantage of 1.4:1 selectivity between the <1,0,0> and the <1,1,1> crystal planes (versus 160:1 for 30% KOH). SelectEtchTM SE-1430 can also be used for shaping of bottle trench capacitors after the initial deep trench etch using dry etch techniques.

“SE-1430 Planar-Selective Silicon etchant allows device manufacturers to effectively create precise structures in crystalline silicon. SACHEM’s expertise in highly pure base chemistries combined with our scientists’ ability to design critical functionality into raw materials contributed to the creation of the new performance Etchant,” commented Dr. Richard Goodin, Technology Vice President of SACHEM, Inc.

SACHEM, Inc. delivers highly pure, precise and innovative chemical solutions designed to solve the most demanding and challenging applications. For over 50 years SACHEM has provided chemical solutions and services to customers in key markets including electronics, biotechnology, polymers, catalysts, pharmaceutical and agricultural chemicals. Based in Austin, Texas, SACHEM’s expanding worldwide operations include manufacturing and research facilities in North America, Europe and Asia with a global service network and presence spanning over 30 countries.