Mobius System ® Chemical Recycling
Safe and environmentally responsible handling of tetramethylammonium hydroxide (TMAH) in semiconductor and Flat Panel Display manufacturing is critical at all stages of Fab operations. SACHEM is committed to caring for the environment and efficient use of resources. By combining our chemical science expertise and technology SACHEM has created the Mobius System®, an innovative recycle technology for true recycle and reuse of TMAH that is recovered from Fab processes.
Expanded use of TMAH in front end of line etching and back end of line wafer thinning can lead to significant volumes of TMAH waste that are added to the already large volumes of wastes from developer and rinses that are generated by photolithographic processes. At the same time, demands for waste reduction improved chemical efficiency and more stringent discharge limits have challenged traditional waste treatment processes and models.
Mobius System® offers our customers and partners the opportunity to use and reuse Critical Raw Materials ensuring sustainability and process economics for their demanding manufacturing applications.
Why use the Mobius System®? Find out more by downloading the Mobius System® Comic Strip.